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Three temperature zone PECVD system
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PECVD system
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Plasma enhanced rotary PECVD system
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Ion sputtering device
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High power PECVD system (Rotary Pendulum Vibration)
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Double chamber sliding rail PECVD
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Rf independent system
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PECVD Plasma Chemical Vapor Deposition System
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Plasma cleaner
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Ion sputtering coating instrument
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PECVD plasma chemical vapor deposition system
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