Double chamber sliding rail PECVD
Release time: 2020-7-25 16:28:50 Number of views: 2477
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Equipment introduction：
Double temperature zone PECVD tubular furnace system, the components of 500W RF generator, positioning independent sliding sintering furnace, high precision mass flow mixing system, stable anti-oil vacuum system. The PECVD can be used to grow nanowires or to produce various thin films by CVD method.
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Configuration
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Main features:
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Model |
NBD-PECVD1200-50T2-N |
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Electrical Spec |
AC220V 3KW Rf power: 300 or 500 watts 13.56Mhz |
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Max working temps. |
1100 ℃ |
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Heating rate |
≤20℃/min |
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Length of heating zone |
200mm+200mm (two heating zones are heated separately, and the split design allows the temperature gradient to reach the limit) |
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Tube size |
Φ50*1800mm |
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RF coils |
Equipment introduction：
Double temperature zone PECVD tubular furnace system, the components of 500W RF generator, positioning independent sliding sintering furnace, high precision mass flow mixing system, stable anti-oil vacuum system. The PECVD can be used to grow nanowires or to produce various thin films by CVD method.
Configuration
Main features:
Model
NBD-PECVD1200-50T2-N
Electrical Spec
AC220V 3KW Rf power: 300 or 500 watts 13.56Mhz
Max working temps.
1100 ℃
Heating rate
≤20℃/min
Length of heating zone
200mm+200mm (two heating zones are heated separately, and the split design allows the temperature gradient to reach the limit)
Tube size
Φ50*1800mm
RF coils
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