Plasma enhanced rotary PECVD system

Release time: 2022-03-21 16:28:28  Number of views: 856

Equipment introduction:

Rotary pendulum PECVD system is suitable for thin film deposition on the surface of powder materials. The system is composed of high power RF power supply (500W, 13.56MHz), gas mass flow control system, vacuum system and rotary pendulum system. It adopts Nobardi operating software of NBD-101EP centralized bus control technology. Plasma properties are used to control or influence the process of gas reaction and chemical reaction on the material surface and to deposit thin films at appropriate temperatures. PECVD deposited films have excellent electrical properties, good substrate adhesion and excellent step coverage. Because of these advantages, it has a wide range of applications in VLSI, photoelectric devices, MEMS and other fields.

  

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Configuration


Main features:
1, the maximum output power of RF power supply: 500W (continuously adjustable), the maximum reflected power 70W;
2. Excellent electromagnetic shielding scheme, efficient and safe!
3, special-shaped high purity quartz furnace tube, large capacity reaction space;
4, unique rotation (60 precision design) pendulum structure, to ensure the material and plasma full contact;
5, three high precision mass flowmeter (can be customized according to requirements), integrated gas mixing system;
6. Unique inlet and outlet design ensures convenient inlet and outlet of equipment under complex structure;
7, RF system, vacuum system, rotary pendulum system is fully integrated in one, 7 inch full touch screen operation, easy to operate, intuitive;
8, can save six groups of process parameters, at any time to call;
9, the experimental data can be automatically screenshot, and support USB interface export.

Electrical Spec

AC220V    1.5KW

Dimension of equipment

W1300mm×H1250mm×D760mm

Reaction chamber

Φ120*L300mm (can be customized, three groups of mixing baffle welding inside), non-RF area diameter: φ60mm;

Turnover speed

0.1 ~ 6 R/min (stepless speed regulation);

Overturning Angle

-3°~+3° The maximum pouring Angle is 30°

Reaction chamber pressure

5~80pa

Flange structure

Aerospace aluminum quick-opening mode;

operating system

NBD-101EP centralized bus control integrated system, 7 "true color touch screen control, intelligent fuzzy PID control; Intelligent human-machine dialogue mode;

Electric push rod power

50W

RF power supply

Output power can be continuously adjusted from 10 to 500W, RF frequency: 13.56MHz ± 0.005%, fully automatic matching;

vacuum test

Digital vacuum gauge acquisition device;

Vacuum acquisition

NBD-4C mechanical vacuum pump (220V/50Hz), power: 0.4KW, pumping speed: 4m ³/h;

Gas supply system

Mass flow controller (range and calibration can be customized) accuracy: ± 1% F.S; Response time: 1-4 seconds;

Equipment Details

control system
1. Sintering process curve setting: dynamically display the set curve, and the equipment sintering can pre store multiple process curves, each of which can be freely set;
2. Pre order sintering is available to achieve unmanned sintering process curve sintering;
3. Real time display of sintering power, voltage and other information, recording of sintering data, and the ability to export for paperless recording;
4. Capable of remote control and real-time observation of equipment status;
5. Temperature correction: The difference between the main control temperature and the sample temperature is nonlinearly corrected throughout the sintering process.

Partial interface

net weight

About 320KG

Equipment usage precautions

1. The RF matching device is generally in automatic matching mode, and the power needs to reach 50W or more to match;
If manual matching is used, set the power to around 60W, manually tune the matching appropriately, and then increase the power
When working, it is necessary to change the air flow rate of the cavity. First, the power must be set to zero, and the RF output cannot be directly turned off by pressing the "OFF" button.

Service Support

One year limited warranty, providing lifelong support;

Disclaimer: The product introduction content on this website (including product images, product descriptions, technical parameters, etc.) is for reference only. Due to delayed updates, there may be some discrepancies between the content and the actual situation. Please contact our customer service personnel for confirmation. The information provided on this website does not constitute any offer or commitment. Nuobadi Company may periodically improve and modify any information on the website without prior notice.
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Sale Service: 0371-6320 2801
                      0371-6320 2805
After-sales service: 0371-6320 2805
MR. CAI: 181-0371-5723
Email : nbd@nbdkj.com
Address:8# zhuyuan, Xinhua subdistrict, Xinzheng, Zhengzhou, China
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