Main features:
1, the maximum output power of RF power supply: 500W (continuously adjustable), the maximum reflected power 70W;
2. Excellent electromagnetic shielding scheme, efficient and safe!
3, special-shaped high purity quartz furnace tube, large capacity reaction space;
4, unique rotation (60 precision design) pendulum structure, to ensure the material and plasma full contact;
5, three high precision mass flowmeter (can be customized according to requirements), integrated gas mixing system;
6. Unique inlet and outlet design ensures convenient inlet and outlet of equipment under complex structure;
7, RF system, vacuum system, rotary pendulum system is fully integrated in one, 7 inch full touch screen operation, easy to operate, intuitive;
8, can save six groups of process parameters, at any time to call;
9, the experimental data can be automatically screenshot, and support USB interface export.

Electrical Spec

AC220V    1.5KW

Dimension of equipment

W1300mm×H1250mm×D760mm；

Φ120*L300mm (can be customized, three groups of mixing baffle welding inside), non-RF area diameter: φ60mm;

Turnover speed

0.1 ~ 6 R/min (stepless speed regulation);

Overturning Angle

-3°～+3° The maximum pouring Angle is 30°

Reaction chamber pressure

5~80pa

Flange structure

Aerospace aluminum quick-opening mode;；

operating system

NBD-101EP centralized bus control integrated system, 7 "true color touch screen control, intelligent fuzzy PID control; Intelligent human-machine dialogue mode;

Electric push rod power

50W

RF power supply

Output power can be continuously adjusted from 10 to 500W, RF frequency: 13.56MHz ± 0.005%, fully automatic matching;

vacuum test

Digital vacuum gauge acquisition device;

Vacuum acquisition

NBD-4C mechanical vacuum pump (220V/50Hz), power: 0.4KW, pumping speed: 4m ³/h;

Gas supply system

Mass flow controller (range and calibration can be customized) accuracy: ± 1% F.S; Response time: 1-4 seconds;

Equipment Details

Partial interface

net weight

About 320KG

Equipment usage precautions

1. The RF matching device is generally in automatic matching mode, and the power needs to reach 50W or more to match;
If manual matching is used, set the power to around 60W, manually tune the matching appropriately, and then increase the power
When working, it is necessary to change the air flow rate of the cavity. First, the power must be set to zero, and the RF output cannot be directly turned off by pressing the "OFF" button.

Service Support

One year limited warranty, providing lifelong support;