Main features:

1, the maximum output power of RF power supply: 500W (continuously adjustable), the maximum reflected power 70W;

2. Excellent electromagnetic shielding scheme, efficient and safe!

3, special-shaped high purity quartz furnace tube, large capacity reaction space;

4, unique rotation (60 precision design) pendulum structure, to ensure the material and plasma full contact;

5, three high precision mass flowmeter (can be customized according to requirements), integrated gas mixing system;

6. Unique inlet and outlet design ensures convenient inlet and outlet of equipment under complex structure;

7, RF system, vacuum system, rotary pendulum system is fully integrated in one, 7 inch full touch screen operation, easy to operate, intuitive;

8, can save six groups of process parameters, at any time to call;

9, the experimental data can be automatically screenshot, and support USB interface export.

Electrical Spec

AC220V    1.5KW

Dimension of equipment

W1300mm×H1250mm×D760mm；

Φ120*L300mm (can be customized, three groups of mixing baffle welding inside), non-RF area diameter: φ60mm;

Turnover speed

0.1 ~ 6 R/min (stepless speed regulation);

Overturning Angle

-3°～+3°  The maximum pouring Angle is 30°

Reaction chamber pressure

5~80pa

法兰结构

航空铝快开模式；

操作系统

NBD-101EP集中总线控制集成系统，7"真彩触摸屏操控，智能模糊PID 控制；智能式人机对话模式；

电动推杆功率

50W 

RF 电源

输出功率10～500W 任意连续可调，射频频率: 13.56MHz ±0.005% ，全自动匹配；

真空测试

数字真空计获取装置；

真空获取

NBD-4C机械真空泵(220V/50Hz)，功率：0.4KW，抽速：4m³/h；

供气系统

质量流量控制器（量程及标定可定制）精度：±1%F.S；响应时间：1-4秒；

设备细节

部分界面

净重

约320KG

设备使用注意事项

1.射频匹配器一般处于自动匹配状态，一般功率需达到50W以上才能匹配；

2.若采用手动匹配，将功率设到60W左右，手动调谐匹配合适时，再增加功率

3.工作时，需改变腔体的气流量，先要要把功率设置为零，不能直接按“OFF”按键关闭射频输出。

服务支持

一年有限保修，提供终身支持；