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Rf independent system

Release time:2020-04-11  Number of views:2260






The RF power dispenser is compact, lightweight and has an air-cooled design. High quality components and a smaller number of parts increase reliability and product life, making good use of your investment and process productivity. An intuitive, quick operation menu (toggled on the component's multifunctional front panel and displayed on a 128 x 64 pixel LCD) brings unmatched convenience -- increasing operator efficiency and keeping training costs low. Equipped with a 13.56MHz RF output, this device is suitable for plasma enhanced chemical vapor deposition (PECVD) use in conventional tubular stoves, making it an ideal choice for PECVD coating in laboratories.



power range

 working frequency

Power stability

reflection power

Protection setting

type of cooling

plasma generator


Continuing Adjust




DC over current protection, power amplifier over temperature protection, reflection power protection

forced air cooling

* This device can be customized to match tubular furnaces


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