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Rf independent system

Release time:2020-04-11  Number of views:2260



 

 

 


     

           

The RF power dispenser is compact, lightweight and has an air-cooled design. High quality components and a smaller number of parts increase reliability and product life, making good use of your investment and process productivity. An intuitive, quick operation menu (toggled on the component's multifunctional front panel and displayed on a 128 x 64 pixel LCD) brings unmatched convenience -- increasing operator efficiency and keeping training costs low. Equipped with a 13.56MHz RF output, this device is suitable for plasma enhanced chemical vapor deposition (PECVD) use in conventional tubular stoves, making it an ideal choice for PECVD coating in laboratories.


 Configuration

Item

power range

 working frequency

Power stability

reflection power

Protection setting

type of cooling

plasma generator

0-500W

Continuing Adjust

13.56MHz

≤2W

70W

DC over current protection, power amplifier over temperature protection, reflection power protection


forced air cooling

* This device can be customized to match tubular furnaces


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