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High power PECVD system (Rotary Pendulum Vibration)

Release time:2020-09-03  Number of views:2336

Equipment introduction:

Rotary pendulum PECVD system is suitable for thin film deposition on the surface of powder materials. The system is composed of high power RF power supply (500W, 13.56MHz), gas mass flow control system, vacuum system and rotary pendulum system. It adopts Nobardi operating software of NBD-101EP centralized bus control technology. Plasma properties are used to control or influence the process of gas reaction and chemical reaction on the material surface and to deposit thin films at appropriate temperatures. PECVD deposited films have excellent electrical properties, good substrate adhesion and excellent step coverage. Because of these advantages, it has a wide range of applications in VLSI, photoelectric devices, MEMS and other fields.


        

 

                            


  Configuration


Main features:

1, the maximum output power of RF power supply: 500W (continuously adjustable), the maximum reflected power 70W;

2. Excellent electromagnetic shielding scheme, efficient and safe!

3, special-shaped high purity quartz furnace tube, large capacity reaction space;

4, unique rotation (60 precision design) pendulum structure, to ensure the material and plasma full contact;

5, three high precision mass flowmeter (can be customized according to requirements), integrated gas mixing system;

6. Unique inlet and outlet design ensures convenient inlet and outlet of equipment under complex structure;

7, RF system, vacuum system, rotary pendulum system is fully integrated in one, 7 inch full touch screen operation, easy to operate, intuitive;

8, can save six groups of process parameters, at any time to call;

9, the experimental data can be automatically screenshot, and support USB interface export.

Electrical Spec

AC220V    1.5KW

设备尺寸

W1300mm×H1250mm×D760mm

反应腔室

Φ120*L300mm(可定制,管内焊接三组搅拌挡板),非射频区管径:φ60mm;

翻转速度

0.16/min(无极调速);

翻转倾角

-3°~+3°  最大倾倒角度30°

反应腔压力

5~80pa

法兰结构

航空铝快开模式;

操作系统

NBD-101EP集中总线控制集成系统,7"真彩触摸屏操控,智能模糊PID 控制;智能式人机对话模式;

电动推杆功率

50W 

RF 电源

输出功率10500W 任意连续可调,射频频率: 13.56MHz ±0.005% ,全自动匹配;

真空测试

数字真空计获取装置;

真空获取

NBD-4C机械真空泵(220V/50Hz),功率:0.4KW,抽速:4m³/h;

供气系统

质量流量控制器(量程及标定可定制)精度:±1%F.S;响应时间:1-4秒;

设备细节

 

 

 

部分界面

 

控制系统


1、烧结工艺曲线设置:动态显示设置曲线,设备烧结可预存多条工艺曲线,每条工艺曲线可自由设置;
2、可预约烧结,实现无人值守烧结工艺曲线烧结;
3、实时显示烧结功率电压等信息并记录烧结数据,并可导出实现无纸记录;
4、具有实现远程操控,实时观测设备状态;
5、温度校正:主控温度和试样温度的差值,烧结全程进行非线性修正。

净重

约320KG

设备使用注意事项

1. 射频匹配器一般处于自动匹配状态,一般功率需达到50W以上才能匹配;
2. 若采用手动匹配,将功率设到60W左右,手动调谐匹配合适时,再增加功率
3. 工作时,需改变腔体的气流量,先要要把功率设置为零,不能直接按“OFF”按键关闭射频输出。

服务支持

一年有限保修,提供终身支持;


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