Add Time： 2020-04-11 View：2668
The RF power dispenser is compact, lightweight and has an air-cooled design. High quality components and a smaller number of parts increase reliability and product life, making good use of your investment and process productivity. An intuitive, quick operation menu (toggled on the component's multifunctional front panel and displayed on a 128 x 64 pixel LCD) brings unmatched convenience -- increasing operator efficiency and keeping training costs low. Equipped with a 13.56MHz RF output, this dev...
The RF power dispenser is compact, lightweight and has an air-cooled design. High quality components and a smaller number of parts increase reliability and product life, making good use of your investment and process productivity. An intuitive, quick operation menu (toggled on the component's multifunctional front panel and displayed on a 128 x 64 pixel LCD) brings unmatched convenience -- increasing operator efficiency and keeping training costs low. Equipped with a 13.56MHz RF output, this device is suitable for plasma enhanced chemical vapor deposition (PECVD) use in conventional tubular stoves, making it an ideal choice for PECVD coating in laboratories.
Configuration
Item | power range | working frequency | Power stability | reflection power | Protection setting | type of cooling | |
plasma generator | 0-500W Continuing Adjust | 13.56MHz | ≤2W | 70W | DC over current protection, power amplifier over temperature protection, reflection power protection |
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* This device can be customized to match tubular furnaces | |||||||
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