Add Time: 2018-11-27 View:3609
Equipment Introduction:Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the surface of a substrate. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories o...
Configuration details
| NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-machine dialogue mode, non-linear temperature correction. | ||||||||
Product Model | O1200-MINI-G3Z | ||||||||
Reach the temperature | ≤1150℃ | ||||||||
Heating zone size | 200mm | ||||||||
Heating rate | ≤20℃/min | ||||||||
Electrical specifications | AC220V 1.2KW | ||||||||
Gas system (optional) | Types of flow meters | Float flow meter | Mass flow meter | ||||||
Piping diagram |
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Number of intake ports | 2、3、4(Multiple options available) | ||||||||
Traffic range | 20-250/20-800ml/min(Multiple ranges available) | 50/100/200sccm(Multiple ranges available) | |||||||
Working pressure difference range | 0-0.15MPa | ||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | |||||
Pumping speed | 1L/s | 3L/s | 4L/s | ||||||
Inlet and outlet port dimensions | Φ8mmTower Coupling | Φ8mmTower Connector | KF16/25 | ||||||
Extreme pressure | 1000Pa | 100Pa | 10Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC220V | ||||||||
High vacuum system (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | NBD-103(C) | |||||
pumping speed | 110L/s | 600L/s | 700L/s | ||||||
Vacuum gauge | Composite vacuum gauge | ||||||||
limiting pressure | 10^-3Pa | 10^-4Pa | 10^-5Pa | ||||||
operation temperature | 5-40℃ | ||||||||
Electrical specifications | AC 220V | AC 220V | AC 380V | ||||||
*Support non-standard customization. For more models, please call 400-000-3746 for inquiries | |||||||||
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