Add Time： 2018-11-27 View：3862
Equipment Introduction:Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by chemical gases or vapors reacting on the substrate surface. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of uni...
Configuration details
| NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-computer dialogue mode, non-linear temperature correction; | ||||||||
Product Model | NBD-HR1200-110TI | ||||||||
Working temperature | ≤1100℃ | ||||||||
Heating zone size | 200mm | ||||||||
Heating rate | ≤100℃/s | ||||||||
Electrical specifications | AC 380V 15KW | ||||||||
Gas system (optional) | Types of flow meters | Float flow meter | Mass flow meter | ||||||
Pipeline diagram |
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Number of intake ports | 2、3、4(Multiple options available) | ||||||||
Traffic range | 20-250/20-800ml/min(Multiple ranges available) | 50/100/200sccm(Multiple ranges available) | |||||||
Working pressure difference range | 0-0.15MPa | ||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | |||||
Pumping speed | 1L/s | 3L/s | 4L/s | ||||||
Inlet and outlet port dimensions | Φ8mmTower Connector | Φ8mmTower connector | KF16/25 | ||||||
Extreme pressure | 1000Pa | 100Pa | 10Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC220V | ||||||||
High vacuum system (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | NBD-103(C) | |||||
Pumping speed | 110L/s | 600L/s | 700L/s | ||||||
Vacuum gauge | Compound vacuum gauge | ||||||||
Ultimate pressure | 10^-3Pa | 10^-4Pa | 10^-5Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC 220V | AC 220V | AC 380V | ||||||
* Supports non-standard customization, more models available, welcome to call for inquiries 400-000-3746 | |||||||||
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