Add Time： 2017-11-16 View：4621
Equipment Introduction:Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by chemical gases or vapors reacting on the substrate surface. It is a widely used technique in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of univ...
| NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-computer dialogue mode, non-linear temperature correction. | |||||||||
Product model | CVDT1500-50TIG3Z | CVD T1500-60TIG3Z | CVD T1500-80TIG3Z | |||||||
Furnace tube size | Φ50*1000mm | Φ60*1000mm | Φ80*1000mm | |||||||
Working temperature | ≤1450℃ | |||||||||
Heating zone size | 310mm | |||||||||
Warming rate | ≤20℃/min | |||||||||
Electrical specifications | AC220V 3KW | |||||||||
Gas system (optional) | Types of flow meters | Float flow meter | Mass flow meter | |||||||
Piping diagram |
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Number of intake ports | 2、3、4(Multiple options available) | |||||||||
Flow range | 20-250/20-800ml/min(Multiple ranges available) | 50/100/200sccm(Multiple ranges available) | ||||||||
Working pressure range | 0-0.15MPa | |||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | ||||||
Pumping speed | 1L/s | 3L/s | 4L/s | |||||||
Inlet and outlet port size | Φ8mmTower connector | Φ8mmTower Connector | KF16/25 | |||||||
Extreme pressure | 1000Pa | 100Pa | 10Pa | |||||||
Working temperature | 5-40℃ | |||||||||
Electrical Specifications | AC220V | |||||||||
High vacuum system (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | NBD-103(C) | ||||||
Pumping speed | 110L/s | 600L/s | 700L/s | |||||||
Vacuum gauge | 复合真空计 | |||||||||
Extreme pressure | 10^-3Pa | 10^-4Pa | 10^-5Pa | |||||||
Working temperature | 5-40℃ | |||||||||
Electrical specifications | AC 220V | AC 220V | AC 380V | |||||||
* Supports custom-made options, more models available, welcome to call for inquiry at 400-000-3746 | ||||||||||
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