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High temperature and high vacuum CVD all-in-one machine

Release time:2022-08-16  Number of views:487

Equipment introduction:

NBD-CVD series high temperature furnace adopts international advanced manufacturing technology as a whole, and from the point of view of aesthetic art, according to the human body safety Angle of design.

The control mathematical model adopts advanced PID self-learning fuzzy control, which keeps the temperature control accuracy at ±1℃. After a long time of various sample test verification, it can be applied to almost all types of materials roasting.


 

 

 

 

 

 


Configuration: 

The equipment adopts a 15.6-inch full-touch intelligent human-computer interaction system, a high-vacuum molecular pump set, a new generation of oil-free scroll vacuum pump as the front pump, and a high-precision gas mass flow control system to realize intelligent sample operation under high-precision gas control and high temperature (Tmax: 1650℃).

Model

NBD-CVD1700-T22G3Z

Tmax

1700

Max working temps
1650℃

Temp Accuracy

±1℃

Touch screen size

15.6 inches

rated power 10KW

Thermocouple type

B type

Recommended heating rate

≤10/min

Tube size
Ø80*1200mm 
ultimate vacuum

6X10-4Pa

Furnace dimensions
L1690×H1410×D765mm

Oil-free scroll dry vacuum pump (front pump, with simple structure, good sealing performance, high limit vacuum advantages. In the application, it has the characteristics of low operating cost, long working life, high reliability, low noise, and has incomparable advantages in the field of oil-free cleaning.


    Control system     

1, sintering process curve setting: dynamic display setting curve, equipment sintering can prestore multiple process curves, each process curve can be set freely;

2, can be booked sintering, unattended sintering process curve sintering;
3, real-time display of sintering power and voltage information and record sintering data, and can be exported to achieve paperless record;
4, with remote control, real-time observation of equipment status;
5. Temperature correction: the difference between the main control temperature and the sample temperature, and the whole sintering process is nonlinear correction.

Gas system (optional)

Type of flowmeter

float flowmeter

mass flowmeter

Pipeline diagram

 

 

Number of inlet ports

2, 3, 4 (multiple optional)

flow range

20-200/60-600l/min(Multi-range option)

50/100/200sccm(Multi-range option)

Range of working pressure difference

0-0.15MPa

Low vacuum system (optional)

Vacuum pump type

NBD-1.5C

NBD-3C

NBD-4C

pumping rate

1L/s

3L/s

4L/s

Inlet and exhaust port dimensions

Φ8mm Pagoda-Shape Connector

Φ8mm Pagoda-Shape Connector

KF16/25

ultimate pressure

1000Pa

100Pa

10Pa

operating temperature

5-40

Electrical Spec

AC 220V

Molecular pump high vacuum system

(Optional)

Molecular pump system model

NBD-103(A)

NBD-103(B)

NBD-103(C)

pumping rate

110L/s

600L/s

700L/s

Vacuum gauge

Composite vacuum gauge

ultimate pressure

10^-3Pa

10^-4Pa

10^-5Pa

operating temperature

5-40

Electrical Spec

AC 220V

AC 220V

AC 380V

* Support non - calibration, more models, welcome to call 400-000-3746

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