Main features:
1. Cleaning and coating in one go, eliminate secondary pollution;
2. Upper open structure, easy to observe the sample;
3. The product adopts automatic control mode, touch screen, digital display;
4. The effect of rapid heating and cooling can be achieved by sliding the furnace body;
5. Stable radio frequency power supply, uniform temperature distribution, improve the quality of film forming.

Model

NBD-PECVD1200-50T2-N

Electrical Spec

AC220V 3KW   Rf power: 300 or 500 watts 13.56Mhz

Max working temps.

1100 ℃ 

Heating rate

≤20℃/min

Length of heating zone

200mm+200mm (two heating zones are heated separately, and the split design allows the temperature gradient to reach the limit)

Tube size

Φ50*1800mm

RF coils

Using multi - node silver - plated water - cooled copper coil, can match different frequency RF power supply

1, sintering process curve setting: dynamic display setting curve, equipment sintering can prestore multiple process curves, each process curve can be set freely;
2, can be booked sintering, unattended sintering process curve sintering;
3, real-time display of sintering power and voltage information and record sintering data, and can be exported to achieve paperless record;
4, with remote control, real-time observation of equipment status;
5. Temperature correction: the difference between the main control temperature and the sample temperature, and the whole sintering process is nonlinear correction.

+/- 1 ℃

Heating element

Mo-doped Fe-Cr-Al alloy

Vacuum degree: ≤10Pa (mechanical pump), to achieve lighting conditions.

Pressure measurement and monitoring

100KG

Cautions   

1. When the furnace temperature of the equipment is greater than or equal to 300℃, it is forbidden to open the furnace to avoid injury;

2. When the equipment is in use, the pressure inside the furnace shall not exceed 0.125MPa (absolute pressure) to prevent the pressure from bursting the sealing flange;

3. When used under high vacuum (10 to the minus 3 Pa), the operating temperature of the equipment shall not exceed 800℃.

Service

One year limited warranty to provide lifelong support;