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Multi-temperature zone tube furnace

Release time:2020-07-07  Number of views:2320



 

Equipment introduction

Multi-temperature zone CVD system integrated furnace, gas supply and vacuum system flexible combination, to meet all kinds of thin film deposition, is the semiconductor industry is the most widely used for deposition of thin film materials, including large area of insulation materials, as well as most metal materials and metal alloy materials. The complete set of CVD coating system of Nobardi is suitable for material laboratories, scientific research institutes, environmental science and other fields in universities.   










 


1. Adopt high purity quartz or stainless steel furnace tube, excellent corrosion resistance and high temperature resistance;
2. High purity Al2O3 fiber refractory insulation material, excellent insulation effect, reduce the power consumption of equipment;
3. The furnace body adopts double-layer air-cooled structure technology, and the upper cover is opened by automatic lifting system;
4. Sintering process curve setting: dynamic display setting curve, equipment sintering can prestore multiple process curves, each process curve can be set freely;
5, can be booked sintering, unattended sintering process curve sintering;
6, real-time display of sintering power and voltage information and record sintering data, and can be exported to achieve paperless record;
7, with remote control, real-time observation of equipment status;
8. Temperature correction: the difference between the main control temperature and the sample temperature, and the whole sintering process is nonlinear correction
9. Integrated equipment includes multi-channel air supply system, multi-temperature zone heating system and high vacuum system.

Heating zone

3-heating zone

4-heating zone

5-heating zone

6-heating zone

Tube size

Ø25/Ø50/Ø60/Ø80/Ø100*1600mm

Max working temps.

≤1150℃

Heating zone selection

(Customizable)

200mm*3

200+300+200mm

200+400+200mm

300mm*3

300+400+300mm

200mm*4

200+300+300+200mm

200+400+400+200mm

300mm*4

300+400+400+300mm

200mm*5

300mm*5

 

200mm*6

300mm*6

 

Heating rate

≤20℃/s

Electrical Spec

AC380V 6~10KW

AC380V 8~14KW

AC380V 10~15KW

AC380V 12~18KW

Gas system (optional)

Float or mass flowmeter

quantity of inlet ports

2、3、4(Multi-channel optional)

flow range

20-250/20-800ml/min......(Multi-range option)

50/100/200/500sccm......(Multi-range option)

Range of working pressure difference

0-0.15MPa

Low vacuum system (optional)

Model (vacuum pump) 

NBD-3C/NBD-4C

pumping rate

3L/s or 4L/s

Inlet and exhaust port dimensions

KF16/25

System vacuum

3~5Pa (Limit vacuum of vacuum pump 6.2*10-2Pa)

operating ambient temp.

5-40℃

Electrical Spec

AC220V

High vacuum system (optional)

Model (vacuum pump)

NBD-103(A)

NBD-103(B)

pumping rate

110L/s

600L/s

vacuum gauge

Composite vacuum gauge

System vacuum

4.310^-3Pa

6*10^-4Pa

operating ambient temp.

5-40℃

 

Electrical Spec

AC 220V

AC 380V

 

* Support non-standard customization, more models, welcome to call 400-000-3746


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