Multi heating zone CVD system
Release time: 2020-07-01 15:45:00 Number of views: 2038
Equipment introduction:
Multi-temperature zone CVD system integrated furnace, flexible combination of gas supply and vacuum system, to meet all kinds of film deposition, is widely used in semiconductor industry. Including the deposition of large areas of insulation, as well as most metal materials and metal alloy materials. The complete set of CVD coating system of Nobardi is suitable for material laboratories, scientific research institutes, environmental science and other fields in universities.
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Specifications
| 1. Adopt high purity quartz or stainless steel furnace tube, excellent corrosion resistance and high temperature resistance; | |||||||||||||||
Number of heating-zone | 3 | 4 | 5 | 6 | ||||||||||||
Tube size | Ø25/Ø50/Ø60/Ø80/Ø100*1600mm | |||||||||||||||
Max working temps. | ≤1150℃ | |||||||||||||||
Heating zone selection (Customizable) | 200mm*3 200+300+200mm 200+400+200mm 300mm*3 300+400+300mm | 200mm*4 200+300+300+200mm 200+400+400+200mm 300mm*4 300+400+400+300mm | 200mm*5 300mm*5 | 200mm*6 300mm*6 | ||||||||||||
Heating rate | ≤20℃/min | |||||||||||||||
Electrical Specifications | AC380V 6~10KW | AC380V 8~14KW | AC380V 10~15KW | AC380V 12~18KW | ||||||||||||
Gas system (optional) | ||||||||||||||||
Piping diagram |
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Number of intake ports | 2、3、4(Multiple options available) | |||||||||||||||
Traffic range | 20-250/20-800ml/min......(Multiple ranges available) 50/100/200/500sccm......(Multiple ranges available) | |||||||||||||||
Working pressure range | 0-0.15MPa | |||||||||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-3C/NBD-4C | ||||||||||||||
Pumping speed | 3L/s或4L/s | |||||||||||||||
Inlet and outlet port size | KF16/25 | |||||||||||||||
System vacuum | 3~5Pa(Vacuum pump ultimate vacuum 6.2*10^-2 Pa) | |||||||||||||||
Working environment temperature | 5-40℃ | |||||||||||||||
Electrical specifications | AC220V | |||||||||||||||
高真空系统（可选购） | Vacuum pump model | NBD-103(A) | NBD-103(B) | |||||||||||||
Pumping speed | 110L/s | 600L/s | ||||||||||||||
Vacuum gauge | Compound vacuum gauge | |||||||||||||||
System vacuum | 4.310^-3Pa | 6*10^-4Pa | ||||||||||||||
Working temperature | 5-40℃ | |||||||||||||||
Electrical specifications | AC 220V | AC 380V | ||||||||||||||
* 支持非标定做，更多型号，欢迎来电垂询400-000-3746 | ||||||||||||||||
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Phone: 400-000-3746
0371-6320 2805
After-sales service： 0371-6320 2805
MR. CAI： 181-0371-5723
Mr.Gao: 188-3829-0747
Ms.Huang: 188-3829-0748
Email ： nbd@nbdkj.com
Address：8# zhuyuan, Xinhua subdistrict, Xinzheng, Zhengzhou, China