Multi heating zone CVD system
Release time: 2020-07-01 23:45:00 Number of views: 2227
Equipment introduction:
Multi-temperature zone CVD system integrated furnace, flexible combination of gas supply and vacuum system, to meet all kinds of film deposition, is widely used in semiconductor industry. Including the deposition of large areas of insulation, as well as most metal materials and metal alloy materials. The complete set of CVD coating system of Nobardi is suitable for material laboratories, scientific research institutes, environmental science and other fields in universities.
Specifications
1. Adopt high purity quartz or stainless steel furnace tube, excellent corrosion resistance and high temperature resistance; | ||||||||||||||||
Number of heating-zone | 3 | 4 | 5 | 6 | ||||||||||||
Tube size | Ø25/Ø50/Ø60/Ø80/Ø100*1600mm | |||||||||||||||
Max working temps. | ≤1150℃ | |||||||||||||||
Heating zone selection (Customizable) | 200mm*3 200+300+200mm 200+400+200mm 300mm*3 300+400+300mm | 200mm*4 200+300+300+200mm 200+400+400+200mm 300mm*4 300+400+400+300mm | 200mm*5 300mm*5 | 200mm*6 300mm*6 | ||||||||||||
Heating rate | ≤20℃/min | |||||||||||||||
Electrical Specifications | AC380V 6~10KW | AC380V 8~14KW | AC380V 10~15KW | AC380V 12~18KW | ||||||||||||
Gas system (optional) | ||||||||||||||||
Piping diagram | ||||||||||||||||
Number of intake ports | 2、3、4(Multiple options available) | |||||||||||||||
Traffic range | 20-250/20-800ml/min......(Multiple ranges available) 50/100/200/500sccm......(Multiple ranges available) | |||||||||||||||
Working pressure range | 0-0.15MPa | |||||||||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-3C/NBD-4C | ||||||||||||||
Pumping speed | 3L/s或4L/s | |||||||||||||||
Inlet and outlet port size | KF16/25 | |||||||||||||||
System vacuum | 3~5Pa(Vacuum pump ultimate vacuum 6.2*10^-2 Pa) | |||||||||||||||
Working environment temperature | 5-40℃ | |||||||||||||||
Electrical specifications | AC220V | |||||||||||||||
High vacuum system (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | |||||||||||||
Pumping speed | 110L/s | 600L/s | ||||||||||||||
Vacuum gauge | Compound vacuum gauge | |||||||||||||||
System vacuum | 4.310^-3Pa | 6*10^-4Pa | ||||||||||||||
Working temperature | 5-40℃ | |||||||||||||||
Electrical specifications | AC 220V | AC 380V | ||||||||||||||
*Support non-standard customization. For more models, please call 400-000-3746 for inquiries |
Disclaimer: The product introduction content on this website (including product images, product descriptions, technical parameters, etc.) is for reference only. Due to delayed updates, there may be some discrepancies between the content and the actual situation. Please contact our customer service personnel for confirmation. The information provided on this website does not constitute any offer or commitment. Nuobadi Company may periodically improve and modify any information on the website without prior notice.
推荐产品

Rotary microwave heating furnace

Multi channel liquid gas-phase generator

High pressure tube furnace

well type furnace G1200-15TI

Large capacity bottom-loading furnace

Automatic hydrogen reduction furnace Type II

High temp. hydrogen vibrating plate sintering furnace

Automatic hydrogen making machine H300
- {{item.cat}}
- {{item2.cat}}
- {{ isExpanded[index2] ? 'Retract' : 'More' }}
Phone: 400-000-3746
0371-6320 2805
After-sales service: 0371-6320 2805
MR. CAI: 181-0371-5723
Mr.Gao: 188-3829-0747
Ms.Huang: 188-3829-0748
Email : nbd@nbdkj.com
Address:8# zhuyuan, Xinhua subdistrict, Xinzheng, Zhengzhou, China