CVD system HR1200-110TID3F
Release time: 2018-11-27 08:40:54 Number of views: 3289
Equipment Introduction:
Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by chemical gases or vapors reacting on the substrate surface. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental sciences, and other fields.
| 设备简介： 化学气相沉积(CVD)是指化学气体或蒸汽在基质表面反应合成涂层或纳米材料的方法，是半导体工业中应用非常广泛的用来沉积薄膜材料的技术，包括大范围的绝缘材料，以及大多数金属材料和金属合金材料。为此我们研发成套的CVD镀膜系统，适用于各大高校材料实验室、科研院所、环保科学等领域。
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Configuration details
| NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-computer dialogue mode, non-linear temperature correction; | ||||||||
Product Model | NBD-HR1200-110TI | ||||||||
Working temperature | ≤1100℃ | ||||||||
Heating zone size | 200mm | ||||||||
Heating rate | ≤100℃/s | ||||||||
Electrical specifications | AC 380V 15KW | ||||||||
Gas system (optional) | Types of flow meters | Float flow meter | Mass flow meter | ||||||
Pipeline diagram |
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Number of intake ports | 2、3、4(Multiple options available) | ||||||||
Traffic range | 20-250/20-800ml/min(Multiple ranges available) | 50/100/200sccm(Multiple ranges available) | |||||||
Working pressure difference range | 0-0.15MPa | ||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | |||||
Pumping speed | 1L/s | 3L/s | 4L/s | ||||||
Inlet and outlet port dimensions | Φ8mmTower Connector | Φ8mmTower connector | KF16/25 | ||||||
Extreme pressure | 1000Pa | 100Pa | 10Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC220V | ||||||||
High vacuum system (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | NBD-103(C) | |||||
Pumping speed | 110L/s | 600L/s | 700L/s | ||||||
Vacuum gauge | Compound vacuum gauge | ||||||||
Ultimate pressure | 10^-3Pa | 10^-4Pa | 10^-5Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC 220V | AC 220V | AC 380V | ||||||
* Supports non-standard customization, more models available, welcome to call for inquiries 400-000-3746 | |||||||||
Disclaimer: The product introductions on this site (including product images, descriptions, and technical parameters) are for reference only. There may be discrepancies between the stated content and actual conditions due to untimely updates; please contact our customer service staff for confirmation. The information provided on this site does not constitute any offer or commitment. Nobady Company reserves the right to improve and modify any information on the website from time to time without prior notice.
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Phone: 400-000-3746
0371-6320 2805
After-sales service： 0371-6320 2805
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Ms.Huang: 188-3829-0748
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