System O1200-XT22D2F
Release time: 2018-11-27 08:39:13 Number of views: 3286
Equipment Introduction: Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by the reaction of chemical gases or vapors on the substrate surface. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental science, and other fields.
| Equipment Introduction: Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by the reaction of chemical gases or vapors on the substrate surface. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental science, and other fields.
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配置详情
| NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-computer dialogue mode, non-linear temperature correction. | ||||||||
Product Model | NBD-O1200-XT22Furnace tube diameters of 50, 60, 80, and 100 mm are available. | ||||||||
Working temperature | ≤1150℃ | ||||||||
Heating zone size | 200mm+200mm(Dual temperature dual control) | ||||||||
Heating rate | ≤20℃/min | ||||||||
Electrical specifications | AC 220V 4KW | ||||||||
Gas system (optional) | Types of flow meters | Float flow meter | Mass flow meter | ||||||
Piping diagram |
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Number of intake ports | 2、3、4(Multiple options available) | ||||||||
Traffic volume range | 20-250/20-800ml/min(Multiple ranges available) | 50/100/200sccm(Multiple ranges available) | |||||||
Working pressure difference range | 0-0.15MPa | ||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | |||||
Pumping speed | 1L/s | 3L/s | 4L/s | ||||||
Inlet and outlet port dimensions | Φ8mmTower Fitting | Φ8mmTower connector | KF16/25 | ||||||
Ultimate Pressure | 1000Pa | 100Pa | 10Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC220V | ||||||||
High vacuum system (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | NBD-103(C) | |||||
Pumping speed | 110L/s | 600L/s | 700L/s | ||||||
Vacuum gauge | Composite vacuum gauge | ||||||||
Extreme pressure | 10^-3Pa | 10^-4Pa | 10^-5Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC 220V | AC 220V | AC 380V | ||||||
* Supports custom orders, more models available, welcome to call for inquiries.400-000-3746 | |||||||||
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Phone: 400-000-3746
0371-6320 2805
After-sales service： 0371-6320 2805
MR. CAI： 181-0371-5723
Mr.Gao: 188-3829-0747
Ms.Huang: 188-3829-0748
Email ： nbd@nbdkj.com
Address：8# zhuyuan, Xinhua subdistrict, Xinzheng, Zhengzhou, China