CVD系统O1200-MINI-G3Z
Release time: 2018-11-27 14:27:59 Number of views: 3168
Equipment Introduction:
Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the surface of a substrate. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental science, and other fields.
Configuration details
| NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-machine dialogue mode, non-linear temperature correction. | ||||||||
Product Model | O1200-MINI-G3Z | ||||||||
Reach the temperature | ≤1150℃ | ||||||||
Heating zone size | 200mm | ||||||||
Heating rate | ≤20℃/min | ||||||||
Electrical specifications | AC220V 1.2KW | ||||||||
Gas system (optional) | Types of flow meters | Float flow meter | Mass flow meter | ||||||
Piping diagram |
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Number of intake ports | 2、3、4(Multiple options available) | ||||||||
Traffic range | 20-250/20-800ml/min(Multiple ranges available) | 50/100/200sccm(Multiple ranges available) | |||||||
Working pressure difference range | 0-0.15MPa | ||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | |||||
Pumping speed | 1L/s | 3L/s | 4L/s | ||||||
Inlet and outlet port dimensions | Φ8mmTower Coupling | Φ8mmTower Connector | KF16/25 | ||||||
Extreme pressure | 1000Pa | 100Pa | 10Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC220V | ||||||||
High vacuum system (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | NBD-103(C) | |||||
pumping speed | 110L/s | 600L/s | 700L/s | ||||||
Vacuum gauge | Composite vacuum gauge | ||||||||
limiting pressure | 10^-3Pa | 10^-4Pa | 10^-5Pa | ||||||
operation temperature | 5-40℃ | ||||||||
Electrical specifications | AC 220V | AC 220V | AC 380V | ||||||
*Support non-standard customization. For more models, please call 400-000-3746 for inquiries | |||||||||
Disclaimer: The product introduction content on this website (including product images, product descriptions, technical parameters, etc.) is for reference only. Due to delayed updates, there may be some discrepancies between the content and the actual situation. Please contact our customer service personnel for confirmation. The information provided on this website does not constitute any offer or commitment. Nuobadi Company may periodically improve and modify any information on the website without prior notice.
Configuration details
| NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-machine dialogue mode, non-linear temperature correction. | ||||||||
Product Model | O1200-MINI-G3Z | ||||||||
Reach the temperature | ≤1150℃ | ||||||||
Heating zone size | 200mm | ||||||||
Heating rate | ≤20℃/min | ||||||||
Electrical specifications | AC220V 1.2KW | ||||||||
Gas system (optional) | Types of flow meters | Float flow meter | Mass flow meter | ||||||
Piping diagram |
|
| |||||||
Number of intake ports | 2、3、4(Multiple options available) | ||||||||
Traffic range | 20-250/20-800ml/min(Multiple ranges available) | 50/100/200sccm(Multiple ranges available) | |||||||
Working pressure difference range | 0-0.15MPa | ||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | |||||
Pumping speed | 1L/s | 3L/s | 4L/s | ||||||
Inlet and outlet port dimensions | Φ8mmTower Coupling | Φ8mmTower Connector | KF16/25 | ||||||
Extreme pressure | 1000Pa | 100Pa | 10Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC220V | ||||||||
高真空系统（可选购） | 真空泵型号 | NBD-103(A) | NBD-103(B) | NBD-103(C) | |||||
抽气速率 | 110L/s | 600L/s | 700L/s | ||||||
真空测量计 | 复合真空计 | ||||||||
极限压力 | 10^-3Pa | 10^-4Pa | 10^-5Pa | ||||||
工作温度 | 5-40℃ | ||||||||
电气规格 | AC 220V | AC 220V | AC 380V | ||||||
* 支持非标定做，更多型号，欢迎来电垂询400-000-3746 | |||||||||
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Phone: 400-000-3746
0371-6320 2805
After-sales service： 0371-6320 2805
MR. CAI： 181-0371-5723
Mr.Gao: 188-3829-0747
Ms.Huang: 188-3829-0748
Email ： nbd@nbdkj.com
Address：8# zhuyuan, Xinhua subdistrict, Xinzheng, Zhengzhou, China