CVD system T1700-XTIG2Z
Release time: 2017-11-16 14:28:23 Number of views: 4257
Equipment Introduction:
Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by chemical gases or vapors reacting on the substrate surface. It is a widely used technique in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental sciences, and other fields.
Configuration details
| NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-machine dialogue mode, non-linear temperature correction。 | |||||||||
Product model | CVDT1700-50TIG2Z | CVD T1700-60TIG2Z | CVD T1700-80TIG2Z | |||||||
Furnace tube dimensions | Φ50*1000mm | Φ60*1000mm | Φ80*1000mm | |||||||
Working temperature | ≤1650℃ | |||||||||
Heating zone size | 310mm | |||||||||
Heating rate | ≤20℃/min | |||||||||
=Electrical specifications | AC 220V 4.5KW | |||||||||
Gas system (optional) | Types of flow meters | Float flow meter | Mass flow meter | |||||||
Piping diagram |
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Number of intake ports | 2、3、4(Multiple options available) | |||||||||
Traffic range | 20-250/20-800ml/min (Multiple range options available) | 50/100/200sccm ((Multiple range options available) | ||||||||
Working pressure difference range | 0-0.15MPa | |||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | ||||||
Pumping speed | 1L/s | 3L/s | 4L/s | |||||||
Inlet and outlet port size | Φ8mm宝塔接头 | Φ8mm宝塔接头 | KF16/25 | |||||||
Extreme pressure | 1000Pa | 100Pa | 10Pa | |||||||
Working temperature | 5-40℃ | |||||||||
Electrical specifications | AC220V | |||||||||
High vacuum system (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | NBD-103(C) | ||||||
Pumping speed | 110L/s | 600L/s | 700L/s | |||||||
Vacuum gauge | Compound vacuum gauge | |||||||||
Ultimate pressure | 10^-3Pa | 10^-4Pa | 10^-5Pa | |||||||
Working temperature | 5-40℃ | |||||||||
Electrical Specifications | AC 220V | AC 220V | AC 380V | |||||||
* Supports non-standard customization, more models available, please call 400-000-3746 for inquiries. | ||||||||||
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Phone: 400-000-3746
0371-6320 2805
After-sales service： 0371-6320 2805
MR. CAI： 181-0371-5723
Mr.Gao: 188-3829-0747
Ms.Huang: 188-3829-0748
Email ： nbd@nbdkj.com
Address：8# zhuyuan, Xinhua subdistrict, Xinzheng, Zhengzhou, China