CVDO1200-XT33G2F
Release time: 2017-11-16 06:16:13 Number of views: 3805
Equipment Introduction:
Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by the reaction of chemical gases or vapors on the substrate surface. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental sciences, and other fields.
| Equipment Introduction: Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by the reaction of chemical gases or vapors on the substrate surface. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental sciences, and other fields.
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Configuration details
| NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-machine dialogue mode, non-linear temperature correction. | ||||||||
Product Model | NBD-O1200-XT33 (furnace tube diameter options: 50, 60, 80, 100 mm) | ||||||||
Working temperature | ≤1150℃ | ||||||||
Heating zone size | 200mm+400mm+200mm（三温三控） | ||||||||
Heating rate | ≤20℃/min | ||||||||
Electrical specifications | AC 380V 8KW | ||||||||
Gas system (optional) | Types of flow meters | Float flow meter | Mass flow meter | ||||||
Piping diagram |
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Number of intake ports | 2、3、4(Multiple options available) | ||||||||
Traffic range | 20-250/20-800ml/min(多量程可选) | 50/100/200sccm(多量程可选) | |||||||
Working pressure difference range | 0-0.15MPa | ||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | |||||
Pumping speed | 1L/s | 3L/s | 4L/s | ||||||
Inlet and outlet port sizes | Φ8mmTower Connector | Φ8mmTower Connector | KF16/25 | ||||||
Extreme pressure | 1000Pa | 100Pa | 10Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC220V | ||||||||
High vacuum system (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | NBD-103(C) | |||||
Pumping speed | 110L/s | 600L/s | 700L/s | ||||||
Vacuum gauge | Compound vacuum gauge | ||||||||
Extreme pressure | 10^-3Pa | 10^-4Pa | 10^-5Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC 220V | AC 220V | AC 380V | ||||||
* Supports non-standard customization, more models available, welcome to call for inquiry 400-000-3746 | |||||||||
Disclaimer: The product introduction content on this site (including product images, product descriptions, technical parameters, etc.) is for reference only. There may be certain discrepancies between the stated content and the actual situation due to untimely updates. Please contact our customer service staff for confirmation. The information provided by this site does not constitute any offer or commitment. Nobady Company reserves the right to improve and modify any information on the website from time to time without prior notice.
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Phone: 400-000-3746
0371-6320 2805
After-sales service： 0371-6320 2805
MR. CAI： 181-0371-5723
Mr.Gao: 188-3829-0747
Ms.Huang: 188-3829-0748
Email ： nbd@nbdkj.com
Address：8# zhuyuan, Xinhua subdistrict, Xinzheng, Zhengzhou, China