CVD system O1200-XTID3F
Release time: 2017-11-16 11:58:05 Number of views: 7515
Equipment Introduction:
Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the substrate surface. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental sciences, and other fields.
Configuration details
| NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-computer dialogue mode, non-linear temperature correction. | ||||||||
Product Model | NBD-O1200-XTIFurnace tube diameters of 50, 60, 80, and 100 mm are available. | ||||||||
Working temperature | ≤1150℃ | ||||||||
Heating zone dimensions | 440mm | ||||||||
Heating rate | ≤20℃/min | ||||||||
电气规格Electrical Specifications | AC 220V 4KW | ||||||||
Gas system (optional) | Types of flow meters | Float flow meter | Mass flow meter | ||||||
Piping diagram |
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Number of intake ports | 2、3、4(Multiple options available) | ||||||||
Flow range | 20-250/20-800ml/min(Multiple ranges available) | 50/100/200sccm(Multiple ranges available) | |||||||
Working pressure difference range | 0-0.15MPa | ||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | |||||
Pumping speed | 1L/s | 3L/s | 4L/s | ||||||
Inlet and outlet port size | Φ8mmTower Connector | Φ8mmTower Connector | KF16/25 | ||||||
Extreme pressure | 1000Pa | 100Pa | 10Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC220V | ||||||||
High vacuum system (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | NBD-103(C) | |||||
Pumping speed | 110L/s | 600L/s | 700L/s | ||||||
Vacuum gauge | 复合真空计 | ||||||||
Extreme pressure | 10^-3Pa | 10^-4Pa | 10^-5Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC 220V | AC 220V | AC 380V | ||||||
* Supports non-standard customization, more models available, please call 400-000-3746 for inquiries. | |||||||||
Disclaimer: The product introduction content on this site (including product images, product descriptions, technical parameters, etc.) is for reference only. There may be certain discrepancies between the stated content and the actual situation due to untimely updates. Please contact our customer service staff for confirmation. The information provided on this site does not constitute any offer or commitment. Nobody Company reserves the right to improve and modify any information on the website from time to time without prior notice.
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Phone: 400-000-3746
0371-6320 2805
After-sales service： 0371-6320 2805
MR. CAI： 181-0371-5723
Mr.Gao: 188-3829-0747
Ms.Huang: 188-3829-0748
Email ： nbd@nbdkj.com
Address：8# zhuyuan, Xinhua subdistrict, Xinzheng, Zhengzhou, China