CVD system O1200-XTID3F
Release time: 2017-11-16 03:58:05 Number of views: 7375
| Equipment Introduction: Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the substrate surface. It is a widely used technique in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories in universities, research institutes, environmental science, and other fields. |
配置详情
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NBD-101E嵌入式操作系统中英文互换图形界面，7寸真彩触屏输入，智能式人机对话模式，非线性式样温度修正； | ||||||||
产品型号 | NBD-O1200-XTI（炉管直径50、60、80、100mm可选） | ||||||||
工作温度 | ≤1150℃ | ||||||||
加热区尺寸 | 440mm | ||||||||
升温速率 | ≤20℃/min | ||||||||
电气规格 | AC 220V 4KW | ||||||||
气体系统（可选购） | 流量计类型 | 浮子流量计 | 质量流量计 | ||||||
管道示意图 |
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进气接口数量 | 2、3、4（多路可选） | ||||||||
流量范围 | 20-250/20-800ml/min(多量程可选) | 50/100/200sccm(多量程可选) | |||||||
工作压差范围 | 0-0.15MPa | ||||||||
低真空系统（可选购） | 真空泵型号 | NBD-1.5C | NBD-3C | NBD-4C | |||||
抽气速率 | 1L/s | 3L/s | 4L/s | ||||||
进排气口尺寸 | Φ8mm宝塔接头 | Φ8mm宝塔接头 | KF16/25 | ||||||
极限压力 | 1000Pa | 100Pa | 10Pa | ||||||
工作温度 | 5-40℃ | ||||||||
电气规格 | AC220V | ||||||||
高真空系统（可选购） | 真空泵型号 | NBD-103(A) | NBD-103(B) | NBD-103(C) | |||||
抽气速率 | 110L/s | 600L/s | 700L/s | ||||||
真空测量计 | 复合真空计 | ||||||||
极限压力 | 10^-3Pa | 10^-4Pa | 10^-5Pa | ||||||
工作温度 | 5-40℃ | ||||||||
电气规格 | AC 220V | AC 220V | AC 380V | ||||||
* 支持非标定做，更多型号，欢迎来电垂询400-000-3746 | |||||||||
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| Equipment Introduction: Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the substrate surface. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental sciences, and other fields. |
Configuration details
| NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-computer dialogue mode, non-linear temperature correction. | ||||||||
Product Model | NBD-O1200-XTIFurnace tube diameters of 50, 60, 80, and 100 mm are available. | ||||||||
Working temperature | ≤1150℃ | ||||||||
Heating zone dimensions | 440mm | ||||||||
Heating rate | ≤20℃/min | ||||||||
电气规格Electrical Specifications | AC 220V 4KW | ||||||||
Gas system (optional) | Types of flow meters | Float flow meter | Mass flow meter | ||||||
Piping diagram |
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Number of intake ports | 2、3、4(Multiple options available) | ||||||||
Flow range | 20-250/20-800ml/min(Multiple ranges available) | 50/100/200sccm(Multiple ranges available) | |||||||
Working pressure difference range | 0-0.15MPa | ||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | |||||
Pumping speed | 1L/s | 3L/s | 4L/s | ||||||
Inlet and outlet port size | Φ8mmTower Connector | Φ8mmTower Connector | KF16/25 | ||||||
Extreme pressure | 1000Pa | 100Pa | 10Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC220V | ||||||||
High vacuum system (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | NBD-103(C) | |||||
Pumping speed | 110L/s | 600L/s | 700L/s | ||||||
Vacuum gauge | 复合真空计 | ||||||||
Extreme pressure | 10^-3Pa | 10^-4Pa | 10^-5Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC 220V | AC 220V | AC 380V | ||||||
* Supports non-standard customization, more models available, please call 400-000-3746 for inquiries. | |||||||||
Disclaimer: The product introduction content on this site (including product images, product descriptions, technical parameters, etc.) is for reference only. There may be certain discrepancies between the stated content and the actual situation due to untimely updates. Please contact our customer service staff for confirmation. The information provided on this site does not constitute any offer or commitment. Nobody Company reserves the right to improve and modify any information on the website from time to time without prior notice.
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Phone: 400-000-3746
0371-6320 2805
After-sales service： 0371-6320 2805
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Ms.Huang: 188-3829-0748
Email ： nbd@nbdkj.com
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