3-heating zone type tube furnace 1200℃
Release time: 2017-11-15 06:38:19 Number of views: 4554
Equipment introduction:
In order to meet the requirements of various CVD processes, we integrate multiple temperature zone control instruments into the intelligent control system. You only need to click the touch screen to complete all parameter Settings. While satisfying the gradient control of different temperature zones, multiple temperature zones can also be set as the same temperature point, which can be used as a lengthened single temperature zone. It continues the classic design of the open-type tube furnace, beautiful and practical.
| Equipment introduction: In order to meet the requirements of various CVD processes, we integrate multiple temperature zone control instruments into the intelligent control system. You only need to click the touch screen to complete all parameter Settings. While satisfying the gradient control of different temperature zones, multiple temperature zones can also be set as the same temperature point, which can be used as a lengthened single temperature zone. It continues the classic design of the open-type tube furnace, beautiful and practical.
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Configuration
1. Double-layer steel structure; | ||||||||||
Model | NBD-O1200-50T3GF | NBD-O1200-60T3GF | NBD-O1200-80T3GF | NBD-O1200-100T3GF | ||||||
Electrical Spec | AC380V 2KW+4KW+2KW | |||||||||
Tmax | 1200 ℃ | |||||||||
Max working temps. | 1100 ℃ | |||||||||
Heating rate | ≤ 20 ℃/min | |||||||||
Heating length | 200mm+400mm+200mm(3-heating zone & 3-control: each temperature zone can operate independently) | |||||||||
Tube size | Φ50*1400mm | Φ60*1400mm | Φ80*1400mm | Φ100*1400mm | ||||||
Control system | 1. 15 temperature curves can be pre-stored to avoid the trouble caused by repeated setting of different experimental processes; | |||||||||
Temp Accuracy | +/- 1 ℃ | |||||||||
Heating element | Mo-doped Fe-Cr-Al alloy | |||||||||
Sealing system | ||||||||||
Vacuum degree: ≤10Pa (mechanical pump) | ||||||||||
Pressure measurement & monitoring | The mechanical pressure gauge with damping oil is used to produce damping when the pressure fluctuates and reduce the pointer to swing back and forth. | |||||||||
Gas supply system | Float flowmeter is used to control the flow rate of gas, which is integrated with the equipment for easy control, and the leakage test has been carried out before leaving the factory. | |||||||||
Net weight | 90KG | |||||||||
Cautions | 1. When the furnace temperature of the equipment is greater than or equal to 300℃, it is forbidden to open the furnace to avoid injury; | |||||||||
Service | 1 year warranty with lifetime support (The warranty does not include consumable parts, such as furnace tubes and O-rings). |
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