main features
1. Temperature control
High temperature stability: able to maintain a stable high temperature environment of 1200 ℃, suitable for CVD processes of various materials.
PID intelligent temperature control system: provides high-precision temperature control, with a typical temperature fluctuation range of ± 1 ℃. It supports multiple program heating curve settings and adapts to complex process requirements.
2. Rotation and oscillation functions
Rotating motion: The sample stage or reaction chamber can rotate around the central axis to ensure uniform gas distribution and promote consistency in coating thickness.
Shaking vibration: In addition to rotation, it is also equipped with a shaking device to slightly vibrate the sample in three-dimensional space, further improving the uniformity and density of the coating.
3. Automatic feeding and unloading system
Automated operation: equipped with an automatic feeding and discharging system to achieve continuous feeding and discharging of materials, reduce manual intervention, and improve production efficiency.
Safe and reliable: The automatic feeding and unloading system adopts advanced mechanical arm or conveyor belt technology to ensure the safety and reliability of operation.
Flexibility: It can be adjusted according to the size and shape of different batches of samples to meet diverse experimental needs.
4. Atmosphere control
Multiple atmosphere options: Supports various atmosphere conditions such as vacuum, inert gases (such as nitrogen and argon), reducing gases (such as hydrogen), etc., to meet the CVD needs of different materials.
Optional precise flow control: By using a mass flow controller (MFC), the flow rate of the reaction gas can be precisely adjusted to ensure optimal conditions for the chemical reaction.
5. Intelligent control system
Touch screen interface: an intuitive and user-friendly interface that facilitates users to input parameters, initiate testing, and view results.
Data recording and analysis: Real time monitoring system, convenient for users to track the production process, and automatically record key parameters for subsequent data analysis and quality control.
Remote monitoring and management: It supports remote connection and can monitor and manage equipment through the Internet to improve work efficiency.
6. Safety protection measures
Over temperature protection device: When abnormal high temperature is detected, the system will automatically alarm and cut off the power supply to prevent equipment damage.
Emergency stop button: Ensure the safety of the operator.

Equipment name

1200 ℃ Rotating Swing CVD Coating Heating Furnace

Specification and model

NBD-RT1200-100T2DF2LN

power supply

AC380V 50HZ

rated power

4.5KW

Number of temperature zones

Single temperature dual control

precision

±1℃

heating element

Alloy resistance wire

sensor type

K-type thermocouple with a diameter of 2 * 420mm

Tmax

1200℃

Long term working temperature

1100℃

heating rate

1℃/H-20℃/Min

Size of furnace temperature zone

Φ150*440（220+220）mm

Tilt angle of furnace body

-5-20°

Furnace tube specifications

60*3*1000 middle 100*3*355/380, with 3 internal 20*3*340 scraper blades

Furnace tube rotation speed

1-10rpm

feeding speed

1-25ml/min (powder material)

Maximum feeding particle size

＜φ0.1mm

Capacity of inlet and outlet tanks

2L

rotameter

0.1-0.8L/min

Furnace body size

Length 1763 * Height 1683 * Depth 795mm

Furnace weight

约272KG

control system

Furnace details

Weak pressure measurement and monitoring
Corrosive gas preheater
(Optional)

heating element

Pressure measurement and monitoring

Gas supply system

Service and Support