The main medium treated by this exhaust gas device

Silane SiH4, phosphine PH3, germane GeH4, silicon dioxide SiO2, borane B2H6, boron trifluoride BF3, nitrous oxide (laughing gas) N2O, octafluorocyclobutane C4F8, carbon tetrafluoride CF4, germanium tetrachloride GeCl4, silicon tetrachloride SiCl4, trichlorosilane SiHCl3, chlorine gas Cl2, boron trichloride BCl3, carbon tetrachloride CCl4, carbon chloride CCl2, fluorine gas F2, other acidic and alkaline tail gas hydrogen sulfide H2S, ammonia gas NH3, hydrochloric acid HCl, sulfuric acid H2SO4, sulfur dioxide SO2, dust, etc.

Basic control of fan

One exhaust gas treatment device is equipped with a fan (no backup, no negative pressure stabilizing transmitter and frequency converter linkage).

water pump control

Exhaust gas treatment device, 1 magnetic driven pump, and a filtering device at the water pump outlet.

Water supply and drainage control

The water inlet is replenished manually and automatically, and the drainage is done manually.

Automatic dosing control

Equipped with one set of automatic dosing device, which includes pH probe, metering pump, signal transmission line, and dosing bucket (without stirring). Set the pH value to 4-6, feedback the signal to the metering pump through the pH meter, and add or stop the dosing action in the circulation box. The specific setting and adjustment should be based on the actual concentration situation on site

Safety Control

1. Compressed air online safety control: continuously introducing compressed air online to accelerate the spontaneous combustion of silane tail gas and prevent silane accumulation. The compressed air volume is 2500L/h, and it is recommended that the compressor exhaust pressure be no less than 7Bar.

2. Nitrogen protection safety control: In necessary situations or in case of alarm or emergency, emergency access to nitrogen is required to dilute the protective silane gas and reduce risks.

3. New air supply safety control: Install a new air supply safety port on the emergency combustion cylinder to accelerate the spontaneous combustion of silane tail gas and prevent silane accumulation (this device is not installed in this project).

4. Anti static safety control: The exhaust gas washing device is made of imported PVC material, which generates no static electricity.

5. Wet process safety control: The process adopts wet spray treatment to reduce the heat generated by silane reaction, effectively extinguish the flame, and also hydrolyze silane.

Note: This system can package system operations and data monitoring on the local touch screen. The local control panel PLC reserves TCP/IP communication interfaces, data packaging, and reserved fan operation and fault dry contacts for linkage with your equipment.

Highest safety and stability

stability

1. By adopting a continuous supply of compressed air, it is possible to fully combust waste gas treatment scenarios such as silane SiH4. If hydrogen H2 is present, the system will be kept within the safe limit range of hydrogen H2, ensuring long-term safe operation of the system;

2. Strong multiple high-speed atomization pre cleaning to ensure dust removal, cleaning, and purification capabilities;

3. A strong excretory cone generates a slight negative pressure, improving cleaning and purification capabilities;

4. Adopting a combustion pre atomization spray section and a purification function section to independently inlet, spray, and discharge water, achieving no blockage issues;

5. The problem of air inlet blockage caused by imported equipment with high processing capacity can be cleared without stopping the machine;

6. Independent drainage control system, equipped with a replacement external storage tank, capable of completing drainage and water intake tasks with just one click.

(7) 100% emission compliance commitment

After exhaust treatment, it meets the corresponding national standards of GB16297-1996 "Comprehensive Emission Standards for Air Pollutants" and GB30484-2013 "Emission Standards for Pollutants in the Battery Industry".

(8) Convenient wastewater discharge

The equipment needs to replace the solution after running for a period of time in order to better absorb the exhaust gas. Generally, it should be changed every 10-15 days. It is recommended to check the water and liquid operation status in the early stage and develop an implementation plan within one or two weeks. The wastewater should theoretically be neutral, and the discharge should be connected to the sewage pipe network. To discharge, simply open the corresponding discharge valve, which is easy to operate.

(9) Strong service and technical support capabilities

Quality assurance: The main equipment of this project is guaranteed for 12 months. Free warranty during the warranty period, except for vulnerable and consumable parts of the main equipment, which shall be borne by the purchaser. After the warranty period expires, the cost of warranty shall be covered.

The total installed and operating power of this project is: ＜ 1.5kw.

(10) Floor Area

The project covers an area and height of: length (L) 1m x width (W) 1.5m x height (H) 2.5m (can be indoors).