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Multi heating zone CVD system

Release time:2020-07-01  Number of views:1919

 


Equipment introduction:

Multi-temperature zone CVD system integrated furnace, flexible combination of gas supply and vacuum system, to meet all kinds of film deposition, is widely used in semiconductor industry. Including the deposition of large areas of insulation, as well as most metal materials and metal alloy materials. The complete set of CVD coating system of Nobardi is suitable for material laboratories, scientific research institutes, environmental science and other fields in universities.

  


 

 

 

Specifications

 

1. Adopt high purity quartz or stainless steel furnace tube, excellent corrosion resistance and high temperature resistance;

2. High purity Al2O3 fiber refractory insulation material, excellent insulation effect, reduce the power consumption of equipment;

3. The furnace body adopts double-layer air-cooled structure technology, and the upper cover is opened by automatic lifting system;

4.NBD-101EP embedded operating system Chinese and English interchange graphical interface, 7 inch real color touch screen input, intelligent man-machine dialogue mode, real-time heating power display, non-linear pattern temperature correction; The experimental report is generated independently, and the experimental data is exported for unlimited times.

5. Integrated equipment includes multi-channel air supply system, multi-temperature zone heating system and high vacuum system.

Number of heating-zone

3

4

5

6

Tube size

Ø25/Ø50/Ø60/Ø80/Ø100*1600mm

Max working temps.

≤1150

加热区选择

(可定制)

200mm*3

200+300+200mm

200+400+200mm

300mm*3

300+400+300mm

200mm*4

200+300+300+200mm

200+400+400+200mm

300mm*4

300+400+400+300mm

200mm*5

300mm*5

 

200mm*6

300mm*6

 

升温速率

20/min

电气规格

AC380V 6~10KW

AC380V 8~14KW

AC380V 10~15KW

AC380V 12~18KW

气体系统(可选购)

浮子或质量流量计(MFC)

管道示意图

 

 

进气接口数量

2、3、4(多路可选)

流量范围

20-250/20-800ml/min......(多量程可选)

50/100/200/500sccm......(多量程可选)

工作压差范围

0-0.15MPa

低真空系统(可选购)

真空泵型号

NBD-3C/NBD-4C

抽气速率

3L/s4L/s

进排气口尺寸

KF16/25

系统真空

3~5Pa真空泵极限真空6.2*10-2Pa

工作环境温度

5-40

电气规格

AC220V

高真空系统(可选购)

真空泵型号

NBD-103(A)

NBD-103(B)

抽气速率

110L/s

600L/s

真空测量计

复合真空计

系统真空

4.310^-3Pa

6*10^-4Pa

工作温度

5-40

电气规格

AC 220V

AC 380V

* 支持非标定做,更多型号,欢迎来电垂询400-000-3746


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