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3-heating zone type tube furnace 1200℃

Release time:2017-11-15  Number of views:4470

Equipment introduction:

In order to meet the requirements of various CVD processes, we integrate multiple temperature zone control instruments into the intelligent control system. You only need to click the touch screen to complete all parameter Settings. While satisfying the gradient control of different temperature zones, multiple temperature zones can also be set as the same temperature point, which can be used as a lengthened single temperature zone. It continues the classic design of the open-type tube furnace, beautiful and practical.






 

 

 

 

 



   Configuration

1. Double-layer steel structure;

2. High purity Al2O3 fiber refractory insulation material, maximum energy saving;

3. High purity alumina coating on refractory ceramics can extend the service life;

4. Aluminum Oxide plug helps you create a custom temperature gradient in the tube.

Model

NBD-O1200-50T3GF

NBD-O1200-60T3GF

NBD-O1200-80T3GF

NBD-O1200-100T3GF

Electrical Spec

AC380V    2KW+4KW+2KW

Tmax

1200 ℃ 

Max working temps.

1100 ℃ 

Heating rate

≤  20 ℃/min

Heating length

200mm+400mm+200mm(3-heating zone & 3-control: each temperature zone can operate independently)

Tube size

Φ50*1400mm

Φ60*1400mm

Φ80*1400mm

Φ100*1400mm

Control system

 

1. 15 temperature curves can be pre-stored to avoid the trouble caused by repeated setting of different experimental processes;

2. The experiment process is more intuitive and the operation is more convenient;

3.NBD-101E embedded operating system Chinese and English interchangeable graphical interface, 7 inch true color touch screen input, intelligent man-machine dialogue mode, non-linear pattern temperature correction;

4. It has the functions of overtemperature alarm, broken couple prompt, leakage protection and so on.

Temp Accuracy

+/- 1 ℃

Heating element

 

Mo-doped Fe-Cr-Al alloy

Sealing system

 

 

 

Vacuum degree: ≤10Pa (mechanical pump)

Pressure measurement & monitoring

 

The mechanical pressure gauge with damping oil is used to produce damping when the pressure fluctuates and reduce the pointer to swing back and forth.

Gas supply system

 

Float flowmeter is used to control the flow rate of gas, which is integrated with the equipment for easy control, and the leakage test has been carried out before leaving the factory.

Net weight

90KG

Cautions

1. When the furnace temperature of the equipment is greater than or equal to 300℃, it is forbidden to open the furnace to avoid injury;

2. When the equipment is in use, the pressure in the furnace tube shall not exceed 0.125MPa (absolute pressure) to prevent damage to the equipment caused by excessive pressure;

3. When used in vacuum, the operating temperature of the equipment shall not exceed 800℃.


4. The internal pressure of the gas supply cylinder is high, and when the gas is fed into the furnace tube, the pressure reducing valve must be installed on the cylinder. It is recommended to choose a small pressure reducing valve for test, and the measuring range of the valve is 0.01MPa-0.15MPa, which will be more accurate and safe in use.

5. When the temperature of the furnace body is higher than 1000℃, the furnace tube can not be in a vacuum state, the pressure in the furnace tube and atmospheric pressure, maintain in the state of atmospheric pressure;

6. Long-term use temperature of high purity quartz pipe ≦1100℃

7. During the heating experiment, it is not recommended to close the suction valve and intake valve at the flange end of the furnace tube. If it is necessary to close the air valve to heat the sample, always pay attention to the indicator of the pressure gauge. The absolute reading of the pressure gauge should not be greater than 0.15MPa, and the exhaust valve must be opened immediately to prevent accidents (such as furnace pipe rupture, flanges flying out, etc.).

Service

1 year warranty with lifetime support (The warranty does not include consumable parts, such as furnace tubes and O-rings).


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