Collect    |   Contact    |  中文 / EN
    RTP Series Current Location:Home > PRODUCTS

RTP rapid annealing furnace

Release time:2017-11-15  Number of views:18965

Equipment introduction:

Rapid Thermal Processing Furnace (RTP) not only has a very fast heating rate, but also directly moves the sample to room temperature after the completion of the sintering process to achieve rapid cooling under the physical state. The equipment adopts the air path structure of inner tube inlet and outer tube outlet, which makes the reaction atmosphere fully and evenly contact with the processed sample. Annealing furnace is a common equipment for growing large size two-dimensional graphene by CVD method. The temperature measuring element is directly in contact with the sample to ensure the accuracy of the sample temperature.








1. Double-layer steel structure;

2. High purity Al2O3 fiber refractory insulation material, maximum energy saving;

3. High purity alumina coating on refractory ceramics can extend the service life;

4. Alumina plug helps you create a custom temperature gradient in the tube;

5. The equipment is a national patent protected product, patent number: CN201310005931.6.



Electrical Spec

AC380V   15KW


1100 ℃(Long time use must be connected with external water cooling device)

Max working temps.

1000 ℃ (Continuous use must be connected with external water cooling device)

Heating rate

recommended: ≤  100 ℃/S

Length of heating zone


Tube size


Control system


1. 15 temperature curves can be pre-stored to avoid the trouble caused by repeated setting of different experimental processes;

2. The experiment process is more intuitive and the operation is more convenient;

3.NBD-101E embedded operating system English and Chinese interchange graphical interface, 7 inch real color touch screen input, intelligent man-machine dialogue mode, non-linear pattern temperature correction;

4. It has the functions of overtemperature alarm, broken couple prompt, leakage protection and so on.

Temp Accuracy

+/- 1 ℃

Heating element


Infrared tube heating

Sealing system




Vacuum degree: ≤5Pa (mechanical pump)

Pressure measurement and monitoring


The digital display vacuum gauge can make the vacuum degree display in the furnace tube more intuitive and the experimental results more accurate.

Net weight



1. When the furnace temperature of the equipment is greater than or equal to 300℃, after moving the furnace, it is forbidden to touch the quartz tube where the original furnace is located to avoid injury;

2. When the furnace temperature of the equipment is more than 300℃, it is forbidden to open the furnace to avoid injury;

3. When the equipment is in use, the pressure in the furnace tube shall not exceed 0.125MPa (absolute pressure) to prevent damage to the equipment caused by excessive pressure;

4. When used in vacuum, the operating temperature of the equipment shall not exceed 800℃.

5. The internal pressure of the gas supply cylinder is high, and when the gas is fed into the furnace tube, the pressure reducing valve must be installed on the cylinder. It is recommended to choose a small pressure reducing valve for test, and the range of the pressure reducing valve is 0.01MPa-0.15MPa, which will be more accurate and safe in use.

6. When the temperature of the furnace body is higher than 1000℃, the furnace tube can not be in a vacuum state, the pressure in the furnace tube needs to be equivalent to atmospheric pressure, keep in the state of atmospheric pressure;

7. Long-term use temperature of high purity quartz pipe ≦1100℃

8. During the heating experiment, it is not recommended to close the suction valve and intake valve at the flange end of the furnace tube. If it is necessary to close the air valve to heat the sample, always pay attention to the indicator of the pressure gauge. If the absolute pressure gauge reading is greater than 0.15MPa, the exhaust valve must be opened immediately to prevent accidents (such as furnace pipe rupture, etc.).


1 year warranty with lifetime support (The warranty does not include consumable parts, such as furnace tubes and O-rings). 


 The product introduction content of this site (including product pictures, product descriptions, technical parameters, etc.) is for reference only. There may be some difference between the stated content and the actual situation due to the delay in updating. Please contact our customer service staff for confirmation. The information provided by this Site does not constitute any offer or acceptance. NOBODY will improve and modify any information on this site from time to time without prior notice.

    Related products












Next article:no