Ultrasonic Atomization CVD System

Release time: 2025-10-10 00:02:51  Number of views: 7

The Ultrasonic Spray Pyrolysis Chemical Vapor Deposition (CVD) system is an advanced thin film preparation equipment that combines ultrasonic spray technology with chemical vapor deposition (CVD). It uses ultrasound to atomize liquid precursor solution into uniform droplets at the micrometer or even sub micrometer level, and then transports these droplets to a high-temperature reaction zone through a carrier gas, where thermal decomposition or chemical reactions occur on the substrate surface, thereby depositing high-quality solid thin films.

This technology is particularly applicable to those material systems where it is difficult to obtain high-purity gaseous precursors or the cost of using gaseous precursors is too high. It is an important upgrade of traditional CVD and spray pyrolysis technologies.

  

Product Details

Core features and advantages of the equipment:
1. The precursor has a wide range of sources and low cost:
Low cost and readily available liquid metal salt solutions (such as nitrates, chlorides, acetates) can be used to avoid expensive and dangerous metal organic vapor deposition.
2. Accurate control of components:
Multiple precursor solutions can be mixed and atomized in proportion to achieve precise doping and composition control of multi-component composite films (such as perovskite and ternary cathode materials).
3. Good uniformity of the film:
The droplets generated by ultrasonic atomization have small particle size, narrow distribution, and uniform concentration, which is beneficial for obtaining thin films with uniform thickness and composition.
4. Large sedimentary area:
Easy to achieve large-area uniform deposition, suitable for roll to roll continuous production.
5. The operating temperature is relatively low
Compared to traditional CVD, certain materials can be deposited at lower temperatures (such as FTO at 450-550 ° C).
6. Can prepare complex morphologies:
By adjusting process parameters (concentration, flow rate, temperature), the microstructure of the film (dense, porous, nanoparticles) can be controlled.
7. Green and environmentally friendly:
Avoid using highly toxic metal organic compounds (MO sources), solvents can be recycled.

Device Name

Mini tube furnace

Device Model

NBD-O1200-50TI-80

power supply voltage

220V/50HZ

rated power

1.2KW

Tmax

1200℃

rated temperature

1150℃

Furnace space

Φ80×200mm

Equipment external dimensions

Length 920 x Height 460 x Depth 360mm

sensor type

Type K thermocouple

Recommended heating rate

10℃/min

Can be matched with furnace tube size

Φ25*600mm  Φ50*600mm

Equipment weight

23KG

Anti corrosion ultrasonic atomizer

Device Name

Anti corrosion ultrasonic atomizer

Specification Model

NBD-U2.4-0.36L

power supply

Single phase 220V 50HZ

rated power

55W (including 35W atomizer and 20W peristaltic pump)

rated flow

9ml/min

Peristaltic pump head model

WP110

Peristaltic pump tube model

2 (inner diameter) * 1mm (wall thickness)

float flow meter

0.5-8L/min

Storage tank capacity

160ml

Atomized particle size

5-10μm

Atomization frequency

2.4MHZ

Equipment size (with metal guide rail and base plate)

Length 800mm * Height 390mm * Depth 280mm

Equipment weight (with metal rails and base plate)

10KG

control system

1. 15 temperature curves can be pre stored to avoid the trouble caused by repeated settings of different experimental processes;
2. The experimental process is more intuitive and the operation is more convenient;
3. The NBD-101E embedded operating system features a graphical interface for exchanging Chinese and English, a 7-inch true color touch screen input, an intelligent human-machine dialogue mode, and non-linear temperature correction;
4. It has functions such as over temperature alarm, disconnection prompt, and leakage protection.

temperature accuracy

+/- 1℃

Equipment usage precautions

When the furnace temperature of the equipment is ≥ 300 ℃, it is forbidden to open the furnace to avoid injury;
When using the equipment, the pressure inside the furnace tube shall not exceed 0.125MPa (absolute pressure) to prevent excessive pressure from bursting the sealing flange;
When used under high vacuum (10-3Pa), the operating temperature of the equipment should not exceed 800 ℃.

Service Support

One year limited warranty, providing lifetime support (the warranty does not include consumable parts such as processing tubes and O-rings, please order replacement parts at the relevant product below)

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Contact Us
Sale Service: 0371-6320 2801
                      0371-6320 2805
After-sales service: 0371-6320 2805
MR. CAI: 181-0371-5723
Email : nbd@nbdkj.com
Address:8# zhuyuan, Xinhua subdistrict, Xinzheng, Zhengzhou, China
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