Core features of the device:
Uniformity: Due to the intense movement of particles, each particle can be uniformly coated, resulting in excellent batch consistency.
Dense coating: Typically, coatings with dense structure and excellent performance can be obtained.
Wide applicability: It can be used to coat various irregularly shaped small particles, such as nuclear fuel particles, graphite particles, ceramic powders, etc.
1. Loading: Load the substrate particles that need to be coated into the reaction chamber through the feeding port and place them on the gas distribution plate.
2. Sealing and Inert Environment Replacement: Seal the reactor, evacuate and replace it multiple times with inert gas to remove air and moisture, and prevent precursor oxidation or danger.
3. Heating and fluidization: Start the heating system and raise the reaction chamber to the predetermined reaction temperature. Simultaneously introducing fluidized gas to bring the bed into a stable fluidized state.
4. Deposition: Introduce the precursor gas into the fluidized gas in proportion to begin the deposition process. Control the thickness and quality of the coating through precise control of gas flow rate, temperature, pressure, and time.
5. Cooling and material extraction: After the deposition is completed, stop introducing the precursor and heating, and continue to introduce inert fluidized gas until the system cools to a safe temperature. Stop ventilation and remove the coated granular product.

Device Name

FBCVD fluidized bed tube furnace

Specification Model

power supply

Three phase 380V 50HZ

rated power

9KW

heating element

Alloy resistance wire

Number of temperature zones

Three temperature zones

sensor type

K-type thermocouple with a diameter of 2 * 420mm

Furnace tube material and size

Tmax

1200℃

rated temperature

1100℃

Recommended heating rate

≤10℃/min

Temperature zone size and length

φ150*（300+300+300）mm

Four channel mass flow controller

Hydrogen gas: S500 1000SCCM with a diameter of 6.35 and a 2-meter double card sleeve. Fluorine rubber sealed nitrogen gas calibration
Nitrogen: S500 1000SCCM with a diameter of 6.35 and a 2-meter double card sleeve. Fluorine rubber sealed nitrogen calibration
Carbon monoxide: S500 2000SCCM with a diameter of 6.35, double card sleeve, 2-meter short wire, fluorine rubber seal, nitrogen calibration
Acrylic: S500 3SLM, diameter 6.35, double card sleeve, 2-meter short wire, fluorine rubber seal, nitrogen calibration

Atomizer

Furnace body size

Length 1105 * Height 2370 * Depth 650mm

control system

1. Sintering process curve setting: dynamically display the set curve, and the equipment sintering can pre store multiple process curves, each of which can be freely set;
2. Pre order sintering is available to achieve unmanned sintering process curve sintering;
3. Real time display of sintering power, voltage and other information, recording of sintering data, and the ability to export for paperless recording;
4. Capable of remote control and real-time observation of equipment status;
5. Temperature correction: The difference between the main control temperature and the sample temperature is nonlinearly corrected throughout the sintering process.

temperature accuracy

±1℃

heating element

Mo doped Fe Cr Al alloy

Ultrasonic atomizer

cyclone separator

Pressure measurement and monitoring

Net weight

About 240KG

Equipment usage precautions

1. When the furnace temperature of the equipment is ≥ 300 ℃, it is forbidden to open the furnace to avoid injury;
2. Minor cracks caused by continuous use of the furnace are a normal phenomenon and do not affect the normal use of the equipment;

Service Support

One year limited warranty, providing lifetime support (the warranty does not include consumable parts such as processing tubes and O-rings, please order replacement parts at the relevant product below)