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    PRODUCTS Current position:HOME > PRODUCTS > 4.RTP Annealing Furnace

RTP Rapid Thermal Processing Furnace

Release time:2017-09-28  viewed:895

Equipment description:

    The Rapid Thermal Processing Furnace (RTP) not only has a very fast heating rate, but also directly moves the samples to room temperature after the sintering process is completed to achieve a Rapid temperature drop in the physical state.

    The equipment adopts the air path structure of inner tube inlet and outer tube outlet, so that the reaction atmosphere is in full and uniform contact with the processed sample.Annealing furnace is a common equipment for growing large size two-dimensional graphene by CVD method.The temperature measuring element is in direct contact with the sample to ensure the accuracy of the sample temperature.







Configuration details

    1. Double steel structure;

    2. High purity Al2O3 fiber refractory insulation material, the maximum energy saving;

    3. The high purity alumina coating on refractory ceramics can prolong the service life.

    4. The alumina tube plug helps you create a custom temperature gradient in the tube.

    5. The equipment is a national patent protection product, patent number: CN201310005931.6.

Product model


Electrical specifications

AC380V   15KW

The highest temperature

1100 ℃(Long time use must be connected with external water cooling device

Continuous temperature

1000 ℃ (Continuous use must be connected with external water cooling device

Maximum heating rate

≤  100 ℃/S

Heating zone length


The furnace pipe size


Control system


1. 15 temperature curves can be stored in advance to avoid the trouble caused by repeated Settings of different experimental processes;

2. The experimental process is more intuitive and the operation is more convenient;

3. Wireless control module can be selected to realize remote control;

4. It has the functions of over temperature alarm, broken couple prompt, leakage protection and so on.

The temperature precision

+/- 1 ℃

Heating element


Infrared tube heating

Sealing system




Vacuum degree: ≤5Pa (mechanical pump)

Pressure measurement and monitoring


By using digital display vacuum gauge, the vacuum degree in the furnace tube of the equipment can be displayed more directly and the experimental results are more accurate.

The net weight


Equipment precautions

1. When the furnace temperature of the equipment is ≥300℃, after moving the furnace, it is forbidden to touch the quartz tube where the original furnace is located to avoid damage;

2. When the equipment is in use, the pressure inside the furnace shall not exceed 0.125mpa (absolute pressure) to prevent damage caused by excessive pressure;

3. When used under high vacuum (10 to the minus 3 Pa), the operating temperature of the equipment shall not exceed 800℃.

Service support

1 year warranty with lifetime support (warranty excludes consumable parts such as furnace tubes and o-rings)

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