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Intelligent Vertical Rotating Deposition Furnace

Add Time: 2026-08-07    View:202

This 1200°C vertical tube furnace is a high-end multifunctional heat treatment equipment integrating high-temperature sintering, precise gas control, dynamic material handling, safe exhaust purification, and intelligent vacuum/atmosphere regulation. Featuring a vertical furnace body structure paired with a high-purity quartz tube chamber, it perfectly suits various processes such as annealing, sintering, reduction, vapor deposition, and surface modification for powders, sheets, and composite mat...

  

Product Details
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Equipment features:

1. 1200℃ high-temperature stable system, high-purity quartz tube furnace

The equipment has a maximum rated operating temperature of 1200°C. It employs high-quality resistance wire heating technology with an intelligent PID temperature control system, achieving a temperature accuracy of ±1°C. The temperature field exhibits excellent uniformity, supporting multi-stage programmable heating, holding, and cooling processes to precisely match various material heat treatment requirements. The furnace chamber is constructed from high-purity transparent quartz tube material, offering high-temperature resistance, oxidation resistance, corrosion resistance, and strong thermal stability. It prevents impurity precipitation at high temperatures, ensuring no contamination of experimental samples. With superior light transmittance and easy cleaning and maintenance, its service life far exceeds that of conventional furnace tube materials, making it suitable for long-term high-frequency experimental and production operations. The double-layer furnace body insulation design effectively reduces surface temperature, enhancing energy efficiency while significantly improving operational safety.

2. Rotating material rack structure, full-area uniform heat treatment

Standard intelligent uniform-speed rotating material support frame, enabling materials to rotate steadily within a high-temperature constant-temperature range. This fundamentally addresses traditional fixed-furnace issues such as uneven heating, single-sided sintering, and poor process consistency. The smooth rotation without vibration ensures 360° uniform heating and gas-phase contact for samples, significantly improving material sintering density, thin-film deposition uniformity, and batch experiment repeatability. It is particularly suitable for high-precision processes like powder suspension sintering, thin-film coating, and heat treatment of irregular workpieces, structurally guaranteeing the stability and reliability of experimental and production data.

3. Vacuum/Positive Pressure Dual Environment, Full Range Atmosphere Control

The equipment supports bidirectional switching between high vacuum and slightly positive inert atmosphere environments, enabling rapid removal of air, moisture, and impurity gases from the furnace to prevent high-temperature oxidation, carbonization, and contamination of samples. It can meet both high-vacuum annealing, vacuum degassing, and vacuum sintering processes while also allowing the introduction of protective gases such as nitrogen, argon, and hydrogen to maintain a stable slightly positive pressure atmosphere. This effectively prevents backflow of external air and is suitable for heat treatment of various easily oxidized, volatile, and highly reactive materials, offering a wide range of operating conditions to meet diverse process R&D and production requirements.

4. High-precision mass flow meter, accurate gas proportioning

Equipped with an industrial-grade high-precision mass flow control system, compared to traditional flow meters, it enables real-time accurate monitoring and automatic regulation of gas flow for each channel, unaffected by temperature and pressure fluctuations. It offers high gas ratio accuracy and strong stability. Supporting independent control of multiple gas channels, automatic switching, and constant flow supply, it precisely achieves standardized management of atmosphere concentration and airflow rate, ensuring consistency in processes such as gas-phase reactions and atmosphere sintering, effectively improving experimental data reproducibility and product batch qualification rates.

6. Professional exhaust gas treatment system, safe, environmentally friendly, and compliant

The integrated dedicated exhaust gas treatment system is designed to address harmful substances such as dust, volatile organic compounds, acidic and alkaline gases, and residual combustible gases generated during heat treatment processes. It achieves multi-stage filtration, adsorption, and purification. With high exhaust gas treatment efficiency, it effectively degrades and adsorbs pollutants, ensuring compliant emissions, eliminating the risk of gas leakage, and balancing operational safety with laboratory and workshop environmental standards. It meets the demands of long-term continuous operation, resolving the issues of traditional tube furnace exhaust pollution and significant safety hazards.

Device Name

Intelligent vertical rotary sedimentation furnace

Specification Model

NBD-LTO1200-120TID2ZY5L-N

power supply

AC220V 50HZ

power supply

4.8KW

temperature control accuracy

±1℃

heating element

Alloy resistance wire

sensor type

Type K thermocouple

Tmax

1200℃

Long term working temperature

≤1150℃

Recommended heating rate

≤10℃/min

Type and size of furnace tube

Quartz tube with a diameter of 120*3*780mm

Type and size of intake pipe

Quartz tube with a diameter of 120*3*780mm

Size of furnace temperature zone

Φ150*400(200+200)mm, Single temperature dual control

Flowmeter type

One way float flowmeter: 0.5-8L/min

Two way mass flow meters:

S500 200SCCM with a diameter of 6.35 and dual card sleeve nitrogen calibration

S500 500SCCM with a diameter of 6.35 and dual card sleeve nitrogen calibration

Maximum rotational speed

500rpm

Hand cranked screw slide table

Travel 530mm

Washing cylinder capacity

1000ml, two

Vacuum pump specifications

NBD-10C KF25 interface

Water cooling machine capacity

5L

Furnace body size

Length 877 * Height 1897 * Depth 610mm

Furnace weight

150KG

control system

 

1. Sintering process curve setting: dynamically display the set curve, and the equipment sintering can pre store multiple process curves, each of which can be freely set;

2. Pre order sintering is available to achieve unmanned sintering process curve sintering;

3. Real time display of sintering power, voltage and other information, recording of sintering data, and the ability to export for paperless recording;

4. Capable of remote control and real-time observation of equipment status;

5. Temperature correction: The difference between the main control temperature and the sample temperature is nonlinearly corrected throughout the sintering process.

Rotating material rack structure
The material can rotate uniformly within a high temperature and constant temperature range, achieving 360 ° all-round uniform heating and uniform gas phase contact of the sample

Appointment sintering

Optimize equipment utilization, ensure sintering process stability, save waiting time, and achieve efficient and orderly sample preparation.

Experimental data storage

Ensure data security, integrity, standardized management, and efficient retrieval.

Nonlinear temperature correction

By using algorithms to nonlinearly correct the temperature deviation between the control point and the sample due to their different positions in the temperature field, the consistency between the control temperature and the sample temperature is improved, the operation is simplified, and the accuracy of experimental data is enhanced.

Multiple sets of process programs can be preset

Multiple sets of experimental exclusive temperature programs can be pre-set to ensure experimental repeatability and ease of operation, support process optimization and data tracing, adapt to team collaboration and technical inheritance, greatly improving experimental efficiency and design flexibility.

remote control

You can log in to the control system anytime and anywhere through computers, mobile phones, and other terminals to view the operating status of the heating furnace (temperature, pressure, heating rate, etc.), and remotely adjust parameters and start/pause programs according to experimental needs. No need to travel back and forth to the laboratory at night or on holidays to meet the parameter tuning needs during the experimental process; Real time monitoring of key experimental processes can also be achieved during cross regional business trips, significantly reducing ineffective commuting time and allowing researchers to allocate work energy more efficiently.

Pressure measurement and monitoring

 

Mechanical pressure gauges are used, and the gauge housing is of an airtight structure, which can effectively protect the internal components from environmental influences and debris intrusion. At the same time, it has strong corrosion resistance and high temperature resistance.

float flow meter

The gas flow rate is controlled by a float flowmeter, which is integrated with the equipment and has undergone leak testing before leaving the factory.

Equipment usage precautions

When using the equipment, the absolute pressure gauge reading should not exceed 0.15MPa to prevent equipment damage caused by excessive pressure;

When used under vacuum, it is recommended that the equipment should not exceed a temperature of 800 ℃. If you have a higher temperature requirement, please contact us for consultation;

Before using this device, please carefully read the precautions for using corundum products;

Service Support

1-year warranty with lifetime support (warranty does not include consumable parts such as furnace tubes and seals).


Widely used in laboratory research and development of materials, chemistry, physics, new energy, and other fields in universities; Semiconductor wafer processing, optical thin film deposition, photovoltaic material modification, lithium battery material sintering, metal powder reduction, ceramic material annealing, nano material preparation, fine chemical high-temperature reaction and other fields are core specialized equipment for new material research and development, precision heat treatment and small-scale production.


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Address:No. 181 Zhengxin Road, Xinzheng City, Zhengzhou, Henan Province